SAR technology Inc. effectively solves the issue of spent acid in the semiconductor industry and reduces carbon emission and water footprints through its leasing model and sulfuric acid recycling technology.

High-purity sulfuric acid is primarily used in the RCA process of semiconductor manufacturing. After use, the spent acid is typically treated through neutralization or derivatization (e.g., converting it into ammonium sulfate, a key nitrogen fertilizer). Each method presents its own set of issues.

Semiconductor growth drives spent acid

In Taiwan, the semiconductor industry generates over 300,000 tons of spent annually, accounting for more than 50% of all its liquid chemical waste. The thriving semiconductor sector in Taiwan has led to a higher demand for electronic-grade sulfuric acid. It is estimated that each new 12-inch wafer fab with advanced processes produces about 30,000 to 50,000 tons of spent acid per year.

Chemicals leasing model for fully circular electronic-grade sulfuric acid

Supported by the Taiwanese government, SAR technology Inc. has established the world's first electronic-grade sulfuric acid circulation plant, and pioneered a patented process for recovering electronic-grade spent acid. This innovative process combines SAR’s specialized sulfuric acid purification technology with MECS’s proprietary methods. It encompasses steps such as spent acid decomposition, flue gas cleaning, SO2/SO3 conversion, SO3 absorption, and purification to regenerate the spent acid, ultimately producing ultra-high-purity electronic-grade sulfuric acid that can be reused in the semiconductor industry. The regeneration process of electronic-grade sulfuric acid produces industrial-grade sulfuric acid as a byproduct, which SAR Tec. can utilize as a raw material in its process of regenerating electronic-grade sulfuric acid.

With its innovative chemicals leasing model, SAR technology Inc. is changing how suppliers and users interact, retaining ownership of electronic-grade sulfuric acid while offering a complete circular service to its clients. Customers simply need to store sulfuric acid and spent acid in designated containers and pipelines for subsequent regeneration. SAR technology Inc. has successfully produced electronic- grade sulfuric acid using spent acid and is actively promoting this circular model.

▪ Enable semiconductor industry in achieving chemical waste reduction, chemical usage minimization, and process-related carbon and water footprint reduction.

Partners: DuPont/MECS